DNS/KAIJO Wet Bench tools Overhaul

Extend tool lifetime
Safety enhancement
Enhance welding point


Since 200mm wet benches has been around for almost two decades, chemical corrosion and mechanical malfunctions are inevitable. This increases maintenance tool down time and furthermore an even more serious concern: occupation safety issue. With the right method we can make your routine PM work a lot easier and better more, increase your tools lifetime for at least another 10 years.

Single Wafer tool refurbishment

We offer total solution refurbishment for 200mm SEZ tools to meet customer's specification.

200mm Single wafer processing tools:

SEZ 201/SEZ 203/SEZ 223/SEZ 4200

300mm Single wafer processing tools

SEZ 323/SEZ 4300/DV34/DV38