For 200mm and 300mm wet process equipment, we will reconfigure/refurbish used core tools according to customers process demands. On top of that we have multiple patented add-on system that can be integrated upon request, offering high quality processing tools at a relatively fair price.
With years of relocation experience, you can hand over your tool with trust that we will deliver it to your designated location.
DNS/KAIJO Wet Bench tools Overhaul
Since 200mm wet benches has been around for almost two decades, chemical corrosion and mechanical malfunctions are inevitable. This increases maintenance tool down time and furthermore an even more serious concern: occupation safety issue. With the right method we can make your routine PM work a lot easier and better more, increase your tools lifetime for at least another 10 years.
Tools that has been in the industry for more than two decades all share the same problem: out of production parts and lack of OEM support. Current solution would be to repair upon failure. However, this only cures the symptom but not the disease; parts would eventually reach a point where it’s impossible to repair. Inspired by this unpleasant experience, we thought to ourselves, why not find a way to get rid of this problem for good?
We will re-write the software of your current tool so that it’s possible to replace parts such as robots and motors to the model of your choice. GUI is fully customizable. GUI from 10 – 20 years ago may not fully fit your demands now, let us know what you want and leave the rest to us.
T21 is a single chamber spin process tool designed to optimize a variety of etch and clean applications. We are motivated to design this system because after years of close partnership with our customers, we understand what they are going through. Through their feedback, our dedicated team of engineers came up with better control unit, integrated defect defense systems. Now T21 has finally been approved by SEMI and is in it’s last stage before entering the market.