Inspired by our customer’s feedback, we created T21, a spin process tool for etch and clean applications with better control unit and defect defense system. T21 is now SEMI-approved and almost ready for the market.
Our Standard series, a reliable and efficient wafer transfer equipment designed to automate front-end loading and unloading for 8-inch and 12-inch wafers.
A wet etching single-wafer 4-chamber process equipment designed for 12-inch wafers used for etching and cleaning in the semiconductor wafer fabrication process.
We specialize in reconfiguring/refurbishing used core tools for 200mm and 300mm wet process equipment, tailored to meet our customers' specific process requirements. In addition, we offer a range of patented add-on systems that can be integrated upon request, providing top-notch processing tools at a reasonable price point.
You can trust us with your equipment relocation needs, as we have years of experience in safely delivering your tools to your designated location.
Tools that has been in the industry for more than two decades all share the same problem: out of production parts and lack of OEM support. Current solution would be to repair upon failure. However, this only cures the symptom but not the disease; parts would eventually reach a point where it's impossible to repair. Hence, we thought to ourselves, why not find a way to solve this issue, once and for all?