SMART UPGRADE & MONITORING · CIP
CIP performance optimisation.
Find modules and functions by process requirement.
CIP performance optimisation
Requirements, modules and functions
- Temperature-sensitive processesMTC
- High-precision chemical temperature control
- Temperature-sensitive processesWTG
- Wafer temperature gradient management
- IPC / motion control upgradeIPC
- Replace an EOS (End of Support) control system with a new system
- Signal integrationSIS
- Signal integration system
- Material changes for process conversionNo module code listed
- Replace plumbing and chamber materials with chemically resistant materials compatible with the new chemicals
- Bubble removalDEB
- In-line bubble removal design
- Drip preventionSBS
- Suckback system
- Complex dosing / mixingNo module code listed
- Smart dosing / mixing system design