EFEM
- Features
- Our Standard Series boasts support for TDK and Asyst load ports, which can be customized with 2 to 4 ports. It also features SECSII and HSMS communication support, ensuring seamless integration into your manufacturing process.
- In addition, our equipment utilizes a four-axis robot with lateral movement, resulting in significantly reduced vibration during lateral transfer. Plus, with a modular design, our equipment can easily be modified to meet the unique needs of our customers.
- Choose our Standard series for a dependable, customizable wafer transfer solution.
Description
Our Standard series, a reliable and efficient wafer transfer equipment designed to automate front-end loading and unloading for 8-inch and 12-inch wafers.