T21

Description

T21 is a single chamber spin process tool designed to optimize a variety of etch and clean applications. We are motivated to design this system because after years of close partnership with our customers, we understand what they are going through. Through their feedback, our dedicated team of engineers came up with better control unit, integrated defect defense systems. Now T21 has finally been approved by SEMI and is in it’s last stage before entering the market.

TOP