The T21 is a cutting-edge single-chamber spin process tool that has been expertly designed to optimize a range of etch and clean applications in the semiconductor industry. Our team of experienced engineers has worked closely with our customers to understand their unique challenges and requirements, and we are proud to have developed a tool that meets their needs.
With advanced features such as a superior control unit and integrated defect defense systems, the T21 is a game-changer in the industry. Our commitment to meeting customer feedback has resulted in a tool that is not only effective but also user-friendly and efficient.
We are thrilled to announce that the T21 has recently received approval from SEMI, the global industry association representing the electronics manufacturing supply chain. We are now in the final stages of preparing the tool for market entry.


Inspired by our customer’s feedback, we created T21, a spin process tool for etch and clean applications with better control unit and defect defense system. T21 is now SEMI-approved and almost ready for the market.